MRSEC researchers enjoy ready access to a number of multiuser instrumentation facilities at the University of Minnesota, as well as to selected equipment in individual laboratories within the College of Science and Engineering, including:
These multi-user facilities are operated and maintained by skilled individuals, who train new users, foster user communities, maintain and upgrade equipment, and develop new characterization methods and applications. All these facilities are available to UMN investigators and external academic and industrial customers via a tiered user fee structure. Students, postdoctoral fellows, faculty, MRSEC summer participants, and external academic and industrial visitors have full "hands-on" access to the equipment after training and certification by the appropriate staff. These shared facilities create a natural environment for stimulating collaborative interactions among individuals from various sectors.
The Characterization Facility ("CharFac") is a multi-user, shared instrumentation facility for materials research spanning from nanotechnology to biology and medicine.
This facility provides access to:
Microscopy via electron beams, force probes, and visible light
Six TEMs (FEI, JEOL) and 4 SEMs (Hitachi, JEOL) including analytical (EDS, EELS/EFTEM, EBSD/TKD, e-diffraction, CL), cryogenic methods and tomography/3D reconstruction; four SPMs (Bruker, Keysight) including environmental capabilities (temperature, RH, in-liquid) and ancillaries for heated-tip thermal analysis (Anasys), fast force-curve mapping (WITec as well as Bruker), and multifrequency methods (IntermodulationProducts as well as Keysight); various LM systems (Nikon, Zeiss; multiple contrasting modes)
Electron and vibrational spectroscopies with mapping
Two XPS systems (Phi, SSI), one including UPS and cluster ion sputtering for soft material depth profiling and scanning Auger (Phi); FTIR (Thermo, with micromapping) and confocal Raman (WITec, with micromapping)
Atomic/molecular/meso structure analysis via X-ray scattering
Seven systems (Bruker, Siemens, Pananalytical, Photonic-Laue, Xenocs) spanning wide, medium, and small angle measurements, including 2D detectors, 2-axis sample goniometers, variable temperature/RH
Nuclear scattering methods (National Electrostatics) for nondestructive elemental depth profiling
Alpha-particle acceleration (up to 5 MeV) for RBS, FReS (H analysis), PIXE, PIGE and channeling analysis (element- and depth-specific crystallinity/epitaxial characterization)
Nano- and micro- mechanical testers (Hysitron, Keysight)
including in-TEM; nano- to macro- tribological probes (tip and colloid-probe FFM, pin-on-disk tribometer)
Other tools for surface and thin-film characterization
Stylus profilometer (Tencor), microtensiometer (Kyowa), spectroscopic ellipsometer (Woollam)
The Minnesota Nano Center (MNC) supports the fabrication, synthesis, and characterization of nanoscale devices and materials for both academic and industrial users. Under the direction of Steve Campbell, the Center offers state-of-the-art cleanroom facilities, a full tool set for microfabrication, and core labs for research into nanomaterials and biological applications of nanoscience.
This facility provides access to:
dc and rf sputtering systems for the deposition of metals, metal oxides, and metal nitrides
Thermal processing systems for growing oxides and annealing thin films deposited on a wide range of substrates
One plasma and three low pressure thermal chemical vapor deposition systems for depositing polysilicon, silicon dioxide, PSG, BPSG, silicon nitride, low stress nitride, silicon oxynitride, and amorphous silicon
Atomic layer deposition systems
Three optical photolithography systems, including an i-line stepper
State-of-the-art electron beam lithography system
Nano-imprint lithography tool
Three reactive ion etching systems for both fluorine and chlorine-based chemistries, including through-wafer etching, a high density plasma etching tool, and an ion mill
Focussed ion beam system
Analyzers for particle size, shape, and charge
Bioscience tools and facilities for cell culture and imaging
The Materials Research Facilities Network is a nationwide partnership of NSF supported MRSEC centers designed to provide support to researchers in the broad area of Materials Research in academic, government and industrial laboratories around the world. The goal of the Facilities Network is to provide users with unprecedented access to instruments, techniques and collaborators in order to enhance their studies of the synthesis, characterization and theory of materials. Initial members of the MRSEC Facilities Network are the University of California, Santa Barbara; University of Massachusetts Amherst; University of Southern Mississippi; University of Minnesota; and the University of Wisconsin Madison.
Funded by the National Science Foundation through the University of Minnesota MRSEC under Award Number DMR-1420013
435 Amundson Hall, 421 Washington Ave. SE, Minneapolis, MN, 55455